3d Ultra-fast Manufactured Micro Coils on Polymer or Metal Cores

نویسندگان

  • U. Wallrabe
  • J. G. Korvink
  • K. Kratt
  • V. Badilita
  • B. Mack
چکیده

We present high aspect ratio 3D solenoidal micro coils manufactured in a serial, high speed and fully MEMS compatible winding procedure using an automatic wire bonder. The coils are wound on steel, glass, or polymer cores with a diameter ranging from 100 μm to 1 mm. The applications of these coils are manifold: as semi-integrated inductors for electronics, for energy harvesting purposes, and for sensors and actuators.

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تاریخ انتشار 2010